| 硅基二氧化硅单模单偏振光波导的设计 |
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| 引用本文： | 郭丽君,石邦任,陈晨,赵猛.硅基二氧化硅单模单偏振光波导的设计[J].半导体学报,2010,31(11):114013-4. |
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| 作者姓名： | 郭丽君 石邦任 陈晨 赵猛 |
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| 摘 要： | 在不增加工艺难度的前提下,利用硅基二氧化硅光波导的双折射效应并结合有效折射率方法, 设计了一种新型单模单偏振波导, 使得两个正交偏振模式中的TM 模式被截止, TE 模式可以通过. 利用三维有限差分光束传输法(3D -BPM ) 进行数值模拟，结果显示，对于TM 模式消光比可高达到50dB 以上.此种结构的光波导可以直接制作偏振器, 同时还易与其他波导器件集成.
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| 关 键 词： | 波导传输 二氧化硅 单偏振 单模式 三维 设计 石英 光束传播方法 |
| 收稿时间： | 5/7/2010 11:14:34 AM |
| 修稿时间： | 6/21/2010 4:10:16 PM |
Design of three-dimensional silica on a silicon single-mode single-polarization waveguide |
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| Guo Lijun,Shi Bangren,Chen Chen and Zhao Meng.Design of three-dimensional silica on a silicon single-mode single-polarization waveguide[J].Chinese Journal of Semiconductors,2010,31(11):114013-4. |
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| Authors: | Guo Lijun Shi Bangren Chen Chen and Zhao Meng |
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| Affiliation: | Department of Physics, Changchun University of Science and Technology, Changchun 130022, China;Department of Physics, Changchun University of Science and Technology, Changchun 130022, China;Department of Physics, Changchun University of Science and Technology, Changchun 130022, China;Department of Physics, Changchun University of Science and Technology, Changchun 130022, China |
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| Abstract: | We present a design of three-dimensional (3D) silica on a silicon single-mode single-polarization waveguide (SMSPW) by taking into consideration the induced birefringence effect of the silica. This can cut off the TM mode and transmit the TE mode. The characteristics of the light propagating across the polarization maintaining waveguide were simulated by 3D beam propagation methods (3D-BPM). The result showed that the SMSPW has a high extinction ratio over 50 dB for the TM mode. Without increasing the complexity of the waveguide fabricating process, this structure can be used as a polarizer directly, and can also be integrated easily into other waveguide devices. |
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| Keywords: | SMSPW birefringence 3D-BPM silica waveguide |
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