Hybrid plasma CVD of diamond-like carbon (DLC) at low temperatures

Diamond-like carbon coatings have been deposited onto various substrates at 100–150°C using a hybrid plasma assisted chemical vapour deposition technique activated by radio frequency at 13.56 MHz. The coatings have been characterized using a number of techniques including scanning electron microscopy, Raman spectroscopy, thermoanalysis and pin-on-disc wear testing. Results show the films to be diamond like, with the addition of nitrogen (prior to deposition) promoting the formation of crystallites. In addition the condition and type of substrate have been found to have a strong influence on the structural characteristics of the deposited diamond-like films. SEM analysis of diamond-like carbon coatings deposited onto metal matrix composite materials such as Si-Al MMC is reported. The hybrid CVD technology enabled films to be deposited evenly onto the porous MMC structure. Commercially manufactured drills, coated with DLC and titanium nitride (TiN), have been compared to examine their cutting wear resistance characteristics. This revised version was published online in November 2006 with corrections to the Cover Date.