TFT-LCD洁净间低位火灾及高位漏水应急管理与处置

为了提高企业对半导体洁净间应急事故的处置能力,从应急管理体系建立及改进处置技术两个方面进行研究。根据洁净间结构及消防系统特点,分析其风险演变特征。结合企业自身组织架构及相关法规,建立企业的ERT组织,并以企业消防网格化管理作为补充。根据对典型事故的分析,得到低位火灾及高位漏水应急处置技术,管理与技术有机结合,有效提高企业的消防管理水平。

Emergency management and disposal of low level fire and high level water leakage in TFT-LCD clean room

In order to improve the ability of enterprises to deal with the semiconductor clean room emergency accidents, the establishment of emergency management system and improvement of disposal technology were studied. According to the characteristics of clean room structure and fire-fighting system, the risk evolution characteristics were analyzed. Combined with the enterprise's own organizational structure and relevant laws and regulations, the ERT organization of the enterprise is established, and the grid management of enterprise fire protection is taken as a supplement. According to the analysis of typical accidents, the emergency disposal technology of low- level fire and high- level water leakage is obtained. The organic combination of management and technology effectively improves the firefighting management level of the enterprise.