The effect of oxygen on the epitaxial growth of diamond |
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| Meng Gong, Yanan Chen, Wancheng Yu, Peng Jin, Zhanguo Wang, Zhimin Wang, Shenjin Zhang, Feng Yang, Fengfeng Zhang, Qinjun Peng, Zuyan Xu. The effect of oxygen on the epitaxial growth of diamond[J]. Journal of Semiconductors, 2018, 39(12): 123004. doi: 10.1088/1674-4926/39/12/123004 M Gong, Y N Chen, W C Yu, P Jin, Z G Wang, Z M Wang, S J Zhang, F Yang, F F Zhang, Q J Peng, Z Y Xu, The effect of oxygen on the epitaxial growth of diamond[J]. J. Semicond., 2018, 39(12): 123004. doi: 10.1088/1674-4926/39/12/123004.Export: BibTex EndNote |
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| Authors: | Meng Gong Yanan Chen Wancheng Yu Peng Jin Zhanguo Wang Zhimin Wang Shenjin Zhang Feng Yang Fengfeng Zhang Qinjun Peng Zuyan Xu |
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| Affiliation: | 1. Key Laboratory of Semiconductor Materials Science, Beijing Key Laboratory of Low-Dimensional Semiconductor Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;2. College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 101408, China;3. Key Laboratory of Functional Crystal and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China |
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| Abstract: | We studied the effect of oxygen on the growth quality of diamond epitaxial layers. After oxygen is added during the growth of the diamond epitaxial layer, as the thickness of the epitaxial layer increases, the full width at half maximum of the rocking curve of the (004) plane of diamond epitaxial layer increases continuously, and, in addition, the intensities of both the Raman peaks and the free exciton emission peaks of the diamond epitaxial layer decrease continuously. These experimental results demonstrate that as the thickness of the diamond epitaxial layer increases, the quality of the diamond epitaxial layer degrades. The strong etching effect of the OH radical groups in the plasma on the diamond epilayers leads to the degradation of their crystallinity. |
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| Keywords: | diamond ultra-wide bandgap semiconductor MPCVD oxygen effect |
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