| 快响应薄膜式高压锰铜传感器 |
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| 引用本文： | 杜晓松,杨邦朝,王卉. 快响应薄膜式高压锰铜传感器[J]. 仪器仪表学报, 2001, 22(1): 98-100 |
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| 作者姓名： | 杜晓松 杨邦朝 王卉 |
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| 作者单位： | 电子科技大学 |
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| 基金项目： | 电子科学研究所“九五”军事电子预研经费资助项目。 |
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| 摘 要： | 本文采用磁控溅射技术制作了新型的薄膜式锰铜超高压力传感器，获得了32ns的快速响应，同时，研究了传感器的安装方式及绝缘封装层的厚度对传感器响应时间的影响关系。
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| 关 键 词： | 锰铜传感器 薄膜 响应时间 压力测试 冲击加载测试 |
High Pressure Thin-film Manganin Gauges of Fast Response |
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| Du Xiaosong,Yang Bangchao,Wang Hui. High Pressure Thin-film Manganin Gauges of Fast Response[J]. Chinese Journal of Scientific Instrument, 2001, 22(1): 98-100 |
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| Authors: | Du Xiaosong Yang Bangchao Wang Hui |
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| Abstract: | A new type of manganin gauges with fast response of 32ns was fabricated in which sensing components of manganin were deposited by magnetron sputtering. The gauges were tested under shock compression by a two stage light gas gun and the effects of mounting mode and packaging thickness on the response time were examined. |
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| Keywords: | Manganin gauges Thin film Response time |
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