谐振式微机械加速度计设计的关键技术

谐振式微机械加速度计直接输出频率信号,具有稳定性好、精度高的特点.分析了谐振式微机械加速度计的工作机理,建立了第一级敏感结构、杠杆机构和第二级敏感结构的数学模型,指出了实现高灵敏度加速度测量的关键技术在于支撑梁、质量块、谐振器和杠杆机构的设计.提出了一种谐振式微机械加速度计结构,进行了结构的优化设计和仿真计算,得出的性能指标:谐振频率98 858 Hz,Q值673.9,灵敏度24.52 Hz/gn.

Critical technologies in design of micromechanical resonant accelerometer

Micromechanical resonant accelerometer has the advantages of direct frequency output,high stability,and high precision.This paper studies the mechanics of micromechanical resonant accelerometer,and creates the mathematical model of the first-level sensing structure,lever structure and the second-level sensing structure.We also explain that the key technique of the measurement of the high sensitivity accelerometer is the design of the bearing beam,the proof mass,the resonator and the leverage mechanisms,and propose a structure of micromechanical resonant accelerometer.At last,the optimum design and the result of the emulation of the structure are achieved,and the performance indexes are:the resonant frequency is 98 858 Hz,the Q value is 673.9,and the sensitivity is 24.52 Hz/gn.