| Uniformity of Electrical Parameters on MCT Epitaxy Film |
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| 作者姓名： | NIELin-ru MENGQing-lan LINan |
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| 作者单位： | CollegeofSciences,KunmingUniversityofScienceandTechnology,Kunming650051,CHN |
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| 基金项目： | National Ministry of Arms Industry (KG 9304) |
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| 摘 要： | For Hall measurement under different magnetic fields at LN2 temperature, Hg1-xCdxTe (MCT) film (radius 1 cm) grown on CdTe substrate by LPE is photoengraved into many small Van Der Pauw squares, then their Hall coefficients and mobilities are measured and analyzed, respectively. Two films were Hall-tested during the temperature range from LHe 4. 2K to about 200K. An actual impression on the uniformity of electrical parameters for MCT film can obtained by means of the methods presented in this paper.
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| 关 键 词： | MCT薄膜 电参数 Hall测量 外延生长 一致性 |
| 收稿时间： | 2003/7/10 |
Uniformity of Electrical Parameters on MCT Epitaxy Film |
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| NIELin-ru MENGQing-lan LINan.Uniformity of Electrical Parameters on MCT Epitaxy Film[J].Semiconductor Photonics and Technology,2004,10(2):93-96. |
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| Authors: | NIE Lin-ru MENG Qing-lan LI Nan |
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| Abstract: | For Hall measurement under different magnetic fields at LN2 temperature,Hg1-xCdxTe (MCT) film (radius 1cm) grown on CdTe substrate by LPE is photoengraved into many small Van Der Pauw squares,then their Hall coefficients and mobilities are measured and analyzed,respectively.Two films were Hall-tested during the temperature range from LHe 4.2K to about 200K.An actual impression on the uniformity of electrical parameters for MCT film can obtained by means of the methods presented in this paper. |
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| Keywords: | MCT film Hall measurement Electrical parameter Uniformity |
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