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Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target |
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| Authors: | Beom-Ki Shin Tae-Il Lee Jyoti Prakash Kar Min-Jung Lee Kang-Il Park Kyung-Jun Ahn Keun-Young Yeom Joong-Hwee Cho Jae-Min Myoung |
| Affiliation: | a Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-Dong, Seodaemun-Gu, Seoul, Republic of Korea;b Department of Materials Science and Engineering, Sungkyunkwan University, 300 Chunchun-Dong, Jangan-Gu, Suwon, Republic of Korea;c Department of Multimedia-System Engineering, University of Incheon, 12-1 Songdo-Dong, Yeonsu-Gu, Incheon, Republic of Korea |
| Abstract: | |
| Keywords: | Al-doped ZnO Pulsed dc magnetron sputtering Cylindrical target Deposition rate Structural and electrical properties |
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