Visible blind p-i-n ultraviolet photodetector fabricated on 4H-SiC

The 4H-SiC visible blind p-i-n ultraviolet (UV) photodetector has been designed, fabricated and characterized. The dark I-V characteristics of the detector were carried out at room temperature. It was found that the photocurrent of detector was at least two orders of magnitude higher than the dark current. The photon response spectrum of the detector was measured and calibrated. The ratio of responsivity at 275 nm to that at 375 nm was nearly 100, which implied that the photodetector has a great improved visible blind performance.