| 不锈钢基体预处理对合成类金刚石碳膜的影响 |
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| 引用本文： | 李明,蔺增,巴德纯,张海鸣. 不锈钢基体预处理对合成类金刚石碳膜的影响[J]. 真空, 2006, 43(5): 16-18 |
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| 作者姓名： | 李明 蔺增 巴德纯 张海鸣 |
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| 作者单位： | 1. 东北大学,辽宁,沈阳,110004
2. 东北大学,辽宁,沈阳,110004;华中科技大学塑性成形模拟及模具技术国家重点实验室,湖北,武汉,430074 |
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| 基金项目： | 辽宁省沈阳市应用基础研究项目;华中科技大学校科研和教改项目 |
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| 摘 要： | 本文研究了在射频等离子体增强化学气相沉积工艺中不同的预处理方法对不锈钢基底上类金刚石碳膜生长的影响。所沉积的碳膜的结构和形貌分别用激光Raman光谱和扫描电子显微镜进行了分析，薄膜与基底的结合力通过划痕实验进行了表征。实验结果表明，通过采用合适的过渡层能显著提高类金刚石碳膜与基底的结合力，而通过化学腐蚀的方法对提高结合力的帮助不大。
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| 关 键 词： | 类金刚石碳膜 不锈钢基底 预处理 膜基结合力 |
| 文章编号： | 1002-0322（2006）05-0016-03 |
| 收稿时间： | 2005-10-02 |
| 修稿时间： | 2005-10-02 |
Influence of pretreatment on synthesis of DLC films on stainless steel substrate |
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| LI Ming,LIN Zeng,BA De-chun,ZHANG Hai-ming. Influence of pretreatment on synthesis of DLC films on stainless steel substrate[J]. Vacuum(China), 2006, 43(5): 16-18 |
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| Authors: | LI Ming LIN Zeng BA De-chun ZHANG Hai-ming |
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| Abstract: | Discusses the influence of pretreatment on the synthesis of DLC films on stainless steel substrate by rf PECVD(radio frequency plasma enhanced chemical vapor deposition) process.The micro-structure and morphology of DLC films were characterized by Raman spectra and SEM,and the adhesion strength between thin films and substrate was characterized by scuffing test.The results revealed that the appropriate interlayer can improve greatly the adhesion strength,while the chemical corrosion is less effective. |
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| Keywords: | diamond-like carbon stainless steel pretreatment adhesion strength |
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