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Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings |
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| Authors: | Oliver James B Kupinski Pete Rigatti Amy L Schmid Ansgar W Lambropoulos John C Papernov Semyon Kozlov Alexei Spaulding John Sadowski Daniel Chrzan Z Roman Hand Robert D Gibson Desmond R Brinkley Ian Placido Frank |
| Affiliation: | Laboratory for Laser Energetics, University of Rochester, Rochester, New York 14623-1299, USA. joli@lle.rochester.edu |
| Abstract: | Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture. |
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