Fabrication of three-dimensional autocloned photonic crystal on sapphire substrate |
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| Authors: | Ku Hao Ming Huang Chen Yang Chao Shiuh |
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| Affiliation: | Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, Taiwan. |
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| Abstract: | We applied the laser interference lithography method to form a patterned sapphire substrate (PSS). A three-dimensional photonic crystal was formed by autocloning the PSS with alternate Ta2O5/SiO2 coatings. A high total integrated reflectance (TIR) band was obtained around the 410 to 470?nm wavelength range that matched the emission spectrum of the gallium nitride (GaN) light-emitting diode (LED) for application in manipulating the light extraction of the sapphire-based GaN LED. |
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