| 黑色组织对直流电弧等离子体喷射金刚石自支撑膜光学、热学性能的影响 |
| |
| 引用本文： | 杨胶溪,段晓峰,吕反修,左铁钏,王凤莲.黑色组织对直流电弧等离子体喷射金刚石自支撑膜光学、热学性能的影响[J].红外技术,2005,27(2):175-178. |
| |
| 作者姓名： | 杨胶溪 段晓峰 吕反修 左铁钏 王凤莲 |
| |
| 作者单位： | 北京工业大学激光工程研究院,北京,100022;中国科学院物理研究所电镜中心,北京,100080;北京科技大学材料科学与工程学院,北京,100083 |
| |
| 基金项目： | 863项目编号:2202AA305508 |
| |
| 摘 要： | 利用直流电弧等离子体喷射化学气相沉积法进行不同质量的金刚石厚膜的制备。金刚石膜用倒置荧光显微镜(OM)、高分辨电镜(HRTEM)、电子能量损失谱(EELS)、拉曼谱(Raman)进行表征，同时测量了不同质量金刚石膜的红外透过率和热导率。研究结果表明，黑色组织主要是金刚石膜中的夹杂物，成分主要是非晶碳和杂质氮。对于光学级透明金刚石膜，具有很高的红外透过率和热导率，黑色组织的存在明显降低了金刚石膜的质量，对金刚石膜的红外透过率和热导率的影响非常显著。
|
| 关 键 词： | 金刚石膜 黑色组织 红外透过率 热导率 |
| 文章编号： | 1001-8891(2005)02-0175-04 |
The Influence of Microfeature on Optical and Thermal Property of DC Arc Plasma Jet CVD Diamond Films |
| |
| YANG Jiao-xi,DUAN Xiao-feng,LV Fan-xiu,ZUO Tie-chuan,Wang Feng-lian.The Influence of Microfeature on Optical and Thermal Property of DC Arc Plasma Jet CVD Diamond Films[J].Infrared Technology,2005,27(2):175-178. |
| |
| Authors: | YANG Jiao-xi DUAN Xiao-feng LV Fan-xiu ZUO Tie-chuan Wang Feng-lian |
| |
| Abstract: | Different grades of CVD diamond films were prepared by 100KW DC Arc Plasma Jet system. The films were characterized using optical microscope (OM), high-resolution transmission electron microscopy (HRTEM), EELS (electron energy loss spectroscopy), Raman spectroscopy. The results show that microfeature mainly is inclusions in CVD diamond films, the concentration are amorphous carbon and nitrogen. For transparent optical grade diamond film, it has very high IR transparency and high thermal conductivity. The appearance of microfeature degraded the quality of CVD diamond film, apparently influencing IR transparency and thermal conductivity. |
| |
| Keywords: | Diamond films Microfeature IR transmission Thermal conductivity |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
