| 用于紫外光电导探测器的TiO2薄膜研究 |
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| 引用本文： | 张利伟,杨仕娥,姚宁,鲁占灵,樊志琴,张兵临. 用于紫外光电导探测器的TiO2薄膜研究[J]. 功能材料与器件学报, 2005, 11(2): 238-240 |
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| 作者姓名： | 张利伟 杨仕娥 姚宁 鲁占灵 樊志琴 张兵临 |
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| 作者单位： | 材料物理重点实验室,郑州大学,郑州,450052;材料物理重点实验室,郑州大学,郑州,450052;材料物理重点实验室,郑州大学,郑州,450052;材料物理重点实验室,郑州大学,郑州,450052;材料物理重点实验室,郑州大学,郑州,450052;材料物理重点实验室,郑州大学,郑州,450052 |
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| 摘 要： | 采用直流反应磁控溅射的方法，制备了TiO2薄膜。用X射线衍射，原子力显微镜(AFM)和紫外-可见光分光光度计分别测试了TiO2薄膜的晶体结构、表面形貌及其紫外-可见光吸收谱，采用C／TiO2／ITO三层结构制备了TiO2光电导型紫外探测器，研究了它的光响应。初步实验结果表明：TiO2薄膜在4W的紫光灯辐射下，光电流可达2．1mA，10min的辐射时间内，光电流基本保持稳定，可见TiO2薄膜对紫外光有较高的灵敏度和稳定性，可作为一种良好的紫外光探测材料。
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| 关 键 词： | 直流反应磁控溅射 TiO2薄膜 光导型紫外探测器 光响应 |
| 文章编号： | 1007-4252(2005)02-0238-03 |
| 修稿时间： | 2004-06-09 |
Study on TiO2 thin films for UV photodetector |
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| ZHANG Li-wei,YANG Shi-e,YAO Ning,LU Zhan-ling,FAN Zhi-qin,ZHANG Bing-lin. Study on TiO2 thin films for UV photodetector[J]. Journal of Functional Materials and Devices, 2005, 11(2): 238-240 |
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| Authors: | ZHANG Li-wei YANG Shi-e YAO Ning LU Zhan-ling FAN Zhi-qin ZHANG Bing-lin |
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| Abstract: | TiO2 thin films were prepared by DC reactive magnetron sputtering. The microstructure, surface morphology and the absorption spectrum of the films were tested by X-ray diffraction, AFM and UV-3150 spectrophotometer. The photoconductive UV detector based on anatase TiO2 thin films is of C/ TiO2/ITO structure, and its photoresponse was investigated. The preliminary results show that the photocurrent of TiO2 thin films rises to 2.1mA, which is stable under 10min irradiation. That means TiO2 thin films is sensitive to UV light and its photoresponse is stable. It indicates that TiO2 thin films are useful material for UV detector. |
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| Keywords: | DC reactive magnetron sputtering TiO_2 thin film photoconductive UV detector photoresponse |
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