| 油田测井用压力传感器的研制∀ |
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| 引用本文： | 赵毅强,姚素英,张生才,赵红,曲宏伟. 油田测井用压力传感器的研制∀[J]. 传感技术学报, 2004, 17(2): 238-240 |
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| 作者姓名： | 赵毅强 姚素英 张生才 赵红 曲宏伟 |
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| 作者单位： | 1. 天津大学电子信息工程学院,天津,300072
2. 大港油田测井公司,天津,300560 |
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| 摘 要： | 油田测井用压力传感器在温度、量程和封装等方面有着特殊的要求,我们提出了一种新型多晶硅压力传感器,其工作温度高(-20～220°C),压力量程宽(2～30 MPa),具有较高的稳定度(<4×10-4FS/°C).文中多晶硅膜的零点温漂TCR 和灵敏度温漂TCS特性,给出了片内温度补偿的方法.
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| 关 键 词： | 油田测井 压力传感器 温度补偿 |
| 文章编号： | 1004-1699(2004)02-0238-03 |
| 修稿时间： | 2003-12-10 |
Research of the Pressure Sensor for Oil-Well Measurement |
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| ZHAO Yi??qiang,YAO Su??ying,ZHANG Sheng??cai,ZHAO Hong,QUHong??wei. Research of the Pressure Sensor for Oil-Well Measurement[J]. Journal of Transduction Technology, 2004, 17(2): 238-240 |
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| Authors: | ZHAO Yi??qiang YAO Su??ying ZHANG Sheng??cai ZHAO Hong QUHong??wei |
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| Affiliation: | ZHAO Yi-qiang1,YAO Su-ying1,ZHANG Sheng-cai1,ZHAO Hong2,QU Hong-wei11. School of Electronics and information Engineering,Tianjin University,Tianjin 300072,China,2. The Oil & Gas development research centre,Dagang Petroleum Co.,Tianjin 300560,China |
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| Abstract: | A new type of pressure sensor for oil??well measurement is developed. It operates at broad temperaturerange( - 20~ 220 ?? ) and broad high pressure range ( 2~ 30 MPa) with high stability ( < 4 10- 4FS/ !C) and lowcost etc. Special considerations are given to the relat ionships between the doping concentration of polysilicon films andTCR and TCS respectively. A new temperature compensation method and technology of high temperature pressure sen??sor are given, the integration of polysilicon temperature sensor on the pressure sensor chip is proposed and fulf illed.This pressure sensor has been successfully applied in the pressure measurement of the oil??well. |
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| Keywords: | high temperature polysilicon pressure sensor temperature compensation oil-well measurement |
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