Patterning polymer metal precursors for high temperature superconducting Bi-Sr-Ca-Cu-O-films

Bi-Sr-Ca-Cu-O HTSC thin films were prepared from polymer metal precursors in a special annealing procedure. The precursor films can be patterned before the annealing process in which the superconducting phase is generated. We have investigated the patterning of precursor films by UV radiation, and the thermal degradation process by thermogravimetry and mass spectroscopy. The HTSC films were characterized by X-ray diffraction and electrical resistivity measurements.