| IMPROVED FABRICATION METHOD FOR CARBON NANOTUBE PROBE OF ATOMIC FORCE MICROSCOPY（AFM） |
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| 作者姓名： | XU Zongwei DONG Shen Precision Engineering Research Institute Harbin Institute of Technology Harbin China GUO Liqiu School of Mechanical Engineering Tsinghua University Beijing China ZHAO Qingliang Precision Engineering Research Institute Harbin Institute of Technology Harbin China |
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| 作者单位： | XU Zongwei DONG Shen Precision Engineering Research Institute，Harbin Institute of Technology，Harbin 150001，China GUO Liqiu School of Mechanical Engineering，Tsinghua University，Beijing 100084，China ZHAO Qingliang Precision Engineering Research Institute，Harbin Institute of Technology，Harbin 150001，China |
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| 摘 要： | An improved arc discharge method is developed to fabricate carbon nanotube probe of atomic force microscopy (AFM) here. First, silicon probe and carbon nanotube are manipulated under an optical microscope by two high precision microtranslators. When silicon probe and carbon nanotube are very close, several tens voltage is applied between them. And carbon nanotube is divided and attached to the end of silicon probe, which mainly due to the arc welding function. Comparing with the arc discharge method before, the new method here needs no coat silicon probe with metal film in advance, which can greatly reduce the fabrication's difficulty. The fabricated carbon nanotube probe shows good property of higher aspect ratio and can more accurately reflect the true topography of silicon grating than silicon probe. Under the same image drive force, carbon nanotube probe had less indentation depth on soft triblock copolymer sample than silicon probe. This showed that carbon nanotube probe has lower spring constant and less damage to the scan sample than silicon probe.
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| 关 键 词： | 碳纳米管 原子力显微镜法 制造方法 纳米科技 |
IMPROVED FABRICATION METHOD FOR CARBON NANOTUBE PROBE OF ATOMIC FORCE MICROSCOPY(AFM) |
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| XU Zongwei DONG Shen Precision Engineering Research Institute,Harbin Institute of Technology,Harbin ,China GUO Liqiu School of Mechanical Engineering,Tsinghua University,Beijing ,China ZHAO Qingliang Precision Engineering Research Institute,Harbin Institute of Technology,Harbin ,China.IMPROVED FABRICATION METHOD FOR CARBON NANOTUBE PROBE OF ATOMIC FORCE MICROSCOPY(AFM)[J].Chinese Journal of Mechanical Engineering,2006,19(3):373-375. |
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| Authors: | XU Zongwei DONG Shen GUO Liqiu ZHAO Qingliang |
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| Affiliation: | [1]Precision Engineering Research Institute, Harbin Institute of Technology, Harbin150001 ,China [2]School of Mechanical Engineering, Tsinghua University, Beijing 100084, China [3]Precision Engineenng Research Institute, Harbin Institute of Technology, Harbin 150001, China |
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| Abstract: | An improved arc discharge method is developed to fabricate carbon nanotube probe of atomic force microscopy (AFM) here. First, silicon probe and carbon nanotube are manipulated under an optical microscope by two high precision microtranslators. When silicon probe and carbon nanotube are very close, several tens voltage is applied between them. And carbon nanotube is divided and attached to the end of silicon probe, which mainly due to the arc welding function. Comparing with the arc discharge method before, the new method here needs no coat silicon probe with metal film in advance, which can greatly reduce the fabrication's difficulty. The fabricated carbon nanotube probe shows good property of higher aspect ratio and can more accurately reflect the true topography of silicon grating than silicon probe. Under the same image drive force, carbon nanotube probe had less indentation depth on soft triblock copolymer sample than silicon probe. This showed that carbon nanotube probe has lower spring constant and less damage to the scan sample than silicon probe. |
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| Keywords: | Carbon nanotube(CNT) Atomic force microscope(AFM) Probe Fabrication |
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