| 电容式MEMS微波功率传感器过载功率的优化 |
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| 引用本文： | 张聪淳,何渊,谢嘉诚,王德波.电容式MEMS微波功率传感器过载功率的优化[J].微电子学,2021,51(3):434-438. |
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| 作者姓名： | 张聪淳 何渊 谢嘉诚 王德波 |
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| 作者单位： | 南京邮电大学 电子与光学工程学院、微电子学院, 南京 210023 |
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| 基金项目： | 国家青年自然科学基金资助项目(61704086)；中国博士后科学基金资助项目(2017M621692)； 江苏省博士后基金资助项目(1701131B)；南京邮电大学国自基金孵化资助项目(NY215139,NY217039) |
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| 摘 要： | 提出了一种等效串联电容式MEMS微波功率传感器,在不影响传感器微波性能的前提下,实现了过载功率的提升.分别建立了传感器的力学模型和集总参数模型,对过载功率特性和微波特性进行了优化与分析.使用Ansys软件和Hfss软件对传感器相关参数进行了仿真,验证了文章所建立模型的准确性.结果表明,当MIM电容相对值β从1.25变化...
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| 关 键 词： | 等效串联电容结构 MEMS功率传感器 过载功率 微波 |
| 收稿时间： | 2020/5/27 0:00:00 |
Optimization of Overload Power of Capacitive MEMS Microwave Power Sensor |
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| ZHANG Congchun,HE Yuan,XIE Jiacheng,WANG Debo.Optimization of Overload Power of Capacitive MEMS Microwave Power Sensor[J].Microelectronics,2021,51(3):434-438. |
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| Authors: | ZHANG Congchun HE Yuan XIE Jiacheng WANG Debo |
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| Affiliation: | College of Elec. and Opt. Engineer. & College of Microelec., Nanjing Univ. of Posts and Telecommun., Nanjing 210023, P. R. China |
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| Abstract: | A capacitive MEMS microwave power sensor with equivalent series capacitor structure was proposed, which could improve the overload power of the sensor without affecting the microwave performance of the sensor. The mechanical model and lumped parameter model of the sensor were established, respectively. The overload power and microwave characteristic of the sensor were optimized and analyzed. Ansys software and Hfss software were used to simulate the relevant parameters of the sensor, and the accuracy of the model established in this work was verified. The results showed that when the relative value of the MIM capacitor changed from 1.25 to 0.8, the overload power was increased by 3.43 times to 6.57 times. At the same time, the system could still have good microwave matching characteristics after optimization. The research results had certain reference value for the improvement of overload power of MEMS microwave power sensor. |
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| Keywords: | equivalent series capacitor structure MEMS power sensor overload power microwave |
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