| 一种可配置的电容-电压转换电路 |
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| 引用本文： | 朱紫兰,李文昌,杨文轩,刘剑.一种可配置的电容-电压转换电路[J].微电子学,2021,51(1):5-9. |
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| 作者姓名： | 朱紫兰 李文昌 杨文轩 刘剑 |
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| 作者单位： | 1. 中国科学院大学, 北京 100049;2. 中国科学院半导体研究所, 北京 100083 |
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| 摘 要： | 提出了一种检测微小电容信号的可配置的电容-电压转换电路.该电路由电容补偿电路、电荷积分电路、采样保持电路、低通滤波和缓冲器组成.使用调制解调的电容检测方法,实现了电容-电压转换.仿真结果表明,电容分辨率为1.70 aF/√Hz,输出电压信号与电容差成正比,确定系数R2为0.999 99.电路中的积分电容值、放大增益、补...
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| 关 键 词： | 电容传感器 电容-电压转换电路 可配置 电容分辨率 |
| 收稿时间： | 2020/2/24 0:00:00 |
A Programmable Capacitance-Voltage Converter |
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| ZHU Zilan,LI Wenchang,YANG Wenxuan,LIU Jian.A Programmable Capacitance-Voltage Converter[J].Microelectronics,2021,51(1):5-9. |
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| Authors: | ZHU Zilan LI Wenchang YANG Wenxuan LIU Jian |
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| Affiliation: | 1. University of Chinese Academy of Sciences, Beijing 100049, P. R. China;2. Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, P. R. China |
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| Abstract: | A programmable capacitance-voltage converter circuit for detecting small capacitance signal was presented. This circuit was composed of balance capacitor arrays, capacitance transimpedance amplifiers, sample/hold circuits, low pass filters and buffers. The capacitance detection method of modulation and demodulation was used to realize capacitance-voltage conversion. The simulation results showed that the capacitance resolution was 1.70 aF/Hz, the output voltage signal was proportional to the capacitance difference, and the determination coefficient R2 was 0.999 99. The integral capacitance value, amplification gain, balance capacitance and bandwidth of the circuit could be set flexibly by programming. The capacitance-voltage converter could be used for MEMS and other capacitive sensors. |
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| Keywords: | capacitive sensor capacitance-to-voltage converter programmable capacitance resolution |
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