用定容式气体流量计进行真空规校准方法的研究

提出了一种采用定容式气体流量计校准真空规的方法,并对校准装置进行了不确定度的分析。定容式气体流量计有2种工作模式:采用定容法模式可以提供(10-8～10-2)Pa.m3/s的流量,采用固定流导法模式可以提供(10-6～10-11)Pa.m3/s的流量,2种方法组合提供的标准流量范围变宽,延伸了流量下限。定容式气体流量计相对于恒压式气体流量计,有结构简单、操作方便等特点。采用定容式气体流量计校准真空规的范围为(10-6～10-2)Pa,合成标准不确定度为(0.67～1.74)%。并用恒压式气体流量计校准同一分离规进行了比较,2个校准结果一致性好于5.7%。

INVESTIGATION FOR CALIBRATING VACUUM GAUGE UTILIZING CONSTANT VOLUME FLOWMETER

An new method of calibrating vacuum gauge which produce standard flow by using constant volume flowmeter is proposed in this paper.The constant volume flowmeter works in two modes: one is constant volume mode which can provide the flow of(10-2～10-8)Pa.m3/s,another is constant conductance mode which can provide the flow of(10-6～10-11)Pa.m3/s.By this way,the standard flow range is extended.Compared with the constant pressure flowmeter,constant volume flowmeter has the advantage of facility,simple structure et...