| CaF2晶体及加工技术研究 |
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| 引用本文： | 段安锋,范翊,刘景和,沈永宏.CaF2晶体及加工技术研究[J].长春理工大学学报,2007,30(2):97-99. |
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| 作者姓名： | 段安锋 范翊 刘景和 沈永宏 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,长春,130031;中国科学院研究生院,北京,100039;中国科学院长春光学精密机械与物理研究所,长春,130031;长春理工大学,长春,130022 |
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| 摘 要： | 随着深紫外准分子激光光刻技术的发展,所用CaF2光学晶体镜头材料的加工对传统的冷加工技术提出了挑战。本文结合CaF2晶体的基本性质,对其加工技术进行了极大的改进。通过控制合适的工艺参数,采用特殊的加工方法可以加工出高质量的CaF2光学晶体。
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| 关 键 词： | CaF2晶体 切割 抛光 晶体加工 |
| 文章编号： | 1672-9870（20D7）02-0097-03 |
| 修稿时间： | 2007-03-02 |
Studies on CaF2 Single Crystals and Its Processing Technique |
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| DUAN Anfeng,FAN Yi,LIU Jingle,SHEN Yonghong.Studies on CaF2 Single Crystals and Its Processing Technique[J].Journal of Changchun University of Science and Technology,2007,30(2):97-99. |
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| Authors: | DUAN Anfeng FAN Yi LIU Jingle SHEN Yonghong |
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| Affiliation: | 1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130031 ; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100039; 3. Changchun University of Science and Technology, Changchun 130022 |
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| Abstract: | With the development of far UV quasi-molecule laser lithography technique,the processing of CaF2 optical crystal lens material challenged traditional cool processing techniques.Combined with the fundamental properties of CaF2 crystal,the processing techniques was improved a lot in this study.Experimental results showed that high-quality optical crystals were processed by optimum technology parameters and the special processing method. |
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| Keywords: | CaF2 crystal cutting polishing crystal processing |
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