| 世界主要MBE设备制造商及产品简介 |
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| 引用本文： | 刘超,包兴明. 世界主要MBE设备制造商及产品简介[J]. 中国材料科技与设备, 2009, 6(5): 14-17 |
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| 作者姓名： | 刘超 包兴明 |
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| 作者单位： | [1]中国科学院半导体研究所,北京100083 [2]四川理工学院理学院,四川自贡643000 |
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| 摘 要： | 本文根据Riber、Veeco、DCA Instruments等著名公司的最新资料简要介绍了世界上主要分子束外延设备制造公司及其主流产品的基本情况，供国内相关领域的读者在了解和选购MBE产品时作参考。
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| 关 键 词： | 分子束外延 半导体薄膜 MBE设备 |
Introduction of the World Main MBE Companies and Their Products |
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| LIU Chao,BAO Xing-ming. Introduction of the World Main MBE Companies and Their Products[J]. Chinese Materials Science Technology & Equipment, 2009, 6(5): 14-17 |
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| Authors: | LIU Chao BAO Xing-ming |
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| Affiliation: | 1 Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083,China; 2 Sichuan University of Science ＆ Engineering, Sichuan,Zigong, 643000,China) |
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| Abstract: | This paper introduces the general information of the world main MBE companies and their mainstream products according to the latest information of these companies, as a reference for Chinese potential MBE vendee when he want to know and purchase MBE systems ＆ components. |
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| Keywords: | Molecular beam epitaxy Semiconductor film MBE system |
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