静电微泵的端点特性研究

针对现有静电微泵性能仿真存在耗时长、需要参数多的问题，建立一种简单、准确的用于描述微泵端点特性的模型。使用端点特性建模技术，由拉格朗日方程得出微泵的运动方程，并给出了静电微泵的端点特性模型和流量表达式；利用能量耦合法和ANSYS分析软件，由宏模型的动态响应方程仿真静电微泵腔的端点特性量关系式。对静电微泵进行动态特性仿真研究，分析结果表明只需泵膜半径、泵膜厚度、静电间隙等参数就能分析微泵腔的动态响应，减少了计算过程的复杂性。

Research on terminal behavior of electrostatic micropump

The simulation of electrostatic micropump behavior requires long time and details on parameter data. It is necessary to construct a simple and verificational model. The movement equation of the electrostatic micropump was deduced from the Lagrange's equation.The terminal behavior model and the flow rate equation were also presented. Then based on the macromodel, which was generated through energy coupled method and ANSYS software, the dynamic response functions were formulated to simulate the electrostatic micropump behavior. The membrane behavior of electrostatic micropump was investigated to obtain the detail. The results show that the dynamic behavior of the membrane can be obtained from some important parameters such as membrane radius, membrane thickness, electrostatic gap and so on, which reduces the complexity of the calculation.