氮含量对a-Si:H/a-SiN_x:H多层膜界面及光学性质的影响(英文)

Investigation into Nitrogen Content Influence on the Interface and Optical Properties of a-Si:H/a-SiN_x :H Multilayers

We have studied TV content influence in two ranges of x(R1.,R2) by Raman, PL, IR spectra on PCVD a-Si:H/a-SiNx:H samples with constant sublayer thickness and cycle number but whole range of x respectively. Raman shows that the FWHM of TO-like peaks increases with x in range R1 and so does the bond angle fluctuation. PL exhibits that the band tail width increases and the NR activation energy as well as the PL efficiency decrease? with x in R1, because of the increase of lattice strain introduced by structural mismatch at interfaces. The above parameters change towards the opposite direction in R2 with a turn at x=0.9, This might be caused by the structure change of a-SiNx into Si3N4 and the greatly increasing of N-H bonds in R2, which enhances the softness of the matrix and relaxes the lattice strain.