Proton sputtering from polycrystalline Al surface interacting with highly charged ions at grazing incidence angle |
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Authors: | Kenji Motohashi Seiji Tsurubuchi |
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Affiliation: | Department of Applied Physics, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi, Tokyo 184-8588, Japan |
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Abstract: | Sputtering processes of protons from a polycrystalline Al surface interacting with Arq+ (q = 3-14) ions at a grazing incidence angle (∼0.5°) were investigated. The intensity of protons (IH) detected in coincidence with scattered Ar atoms was measured as a function of q. IH saturated at q ? 10, although it increased rapidly with q at 3 ? q ? 8. The angular distribution of protons with low kinetic energy (?2 eV) began to deviate from the cosine distribution and assumed a rather flat equidistribution as q increased. To analyze the sputtering processes of protons at the grazing incidence angle, a modified model of the “above-surface potential sputtering model” was proposed by considering image acceleration of projectile ions. |
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Keywords: | 79 20 Rf |
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