| 形核密度对CVD金刚石涂层附着性能的影响 |
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| 引用本文： | 邓福铭,吴学林,赵晓凯.形核密度对CVD金刚石涂层附着性能的影响[J].珠宝科技,2012(2):1-4. |
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| 作者姓名： | 邓福铭 吴学林 赵晓凯 |
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| 作者单位： | 中国矿业大学（北京）超硬刀具材料研究所,北京100083 |
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| 基金项目： | 基金项目：国家自然科学基金（No.51172278）;科技人员服务企业行动计划项目（2009GJAO0033）;北京市教委共建项目（2010-583） |
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| 摘 要： | 采用热丝化学气相沉积法（HFCVD）在硬质合金基体上进行金刚石的形核生长,使用扫描电镜（SEM）对金刚石涂层形核情况进行分析,研究了不同形核密度对CVD金刚石涂层附着力的影响。结果表明：当碳源浓度达到3%时,表面形核密度最高,约为107/cm2;浓度增大为4%时,形核密度降低。通过压痕实验对比分析得出形核工艺中碳源浓度为3%时沉积的金刚石涂层压痕最浅,压痕直径最小,金刚石涂层具有良好的附着性能。
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| 关 键 词： | 化学气相沉积（CVD） 金刚石涂层 硬质合金 形核密度 |
Effects of the nucleation density on the adhesion property of CVD diamond coating |
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| DENG Fu-ming,WU Xue-lin,ZHAO Xiao-kai.Effects of the nucleation density on the adhesion property of CVD diamond coating[J].Jewellery Science and Technology,2012(2):1-4. |
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| Authors: | DENG Fu-ming WU Xue-lin ZHAO Xiao-kai |
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| Affiliation: | { Institute of Super-hard Cutting Tool Materials, China University of Mining and Technology ( Beijing ) , Beijing , 100083) |
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| Abstract: | Nucleation and growth of diamond were conducted on cemented carbide substrate via hot filament chemical vapor deposition { HFVCD}. The diamond nucleation density were investigated by scanning electron microscope { SEM}, the influences of different nucleation density on CVD diamond coating adhesion were studied. The results show that the nucleation density reaches highest when the carbon concentration is 3% with density about 107/cm2, while the nucleation density is quite low as carbon concentration is higher than 3%. By analyzing the compression test, with the 3% carbon concentration in the nucleation process, the indentation of diamond coatings is the shallowest with minimum diameter, which has better adhesion properties. |
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| Keywords: | chemical vapor deposition （CVD） diamond coatings cemented carbide nucleation density |
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