| 压电双晶片作为驱动的精密定位机构研究 |
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| 引用本文： | 张斌,陈西平,浮红霞,杜习波.压电双晶片作为驱动的精密定位机构研究[J].机械与电子,2009(6):39-41. |
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| 作者姓名： | 张斌 陈西平 浮红霞 杜习波 |
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| 作者单位： | 1. 河南理工大学机械与动力工程学院,河南,焦作,454000
2. 河南理工大学国有资产管理处,河南,焦作,454000 |
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| 摘 要： | 设计了一种用柔性铰链作为弹性导轨，压电双晶片作为驱动器，结合三角型放大原理实现的精密定位机构，并采用精密电感式微位移传感器（LVDT）进行位移检测。实验表明，该精密定位机构运动范围为0～25μm，定位精度达到15nm。
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| 关 键 词： | 压电双晶片 精密定位机构 柔性铰链 |
Study on Precision Positioning Mechanism Driven by PZT Bimorph |
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| ZHANG Bin,CHEN Xi-ping,FU Hong-xia,DU Xi-bo.Study on Precision Positioning Mechanism Driven by PZT Bimorph[J].Machinery & Electronics,2009(6):39-41. |
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| Authors: | ZHANG Bin CHEN Xi-ping FU Hong-xia DU Xi-bo |
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| Affiliation: | ZHANG Bin ,CHEN Xi- ping ,FU Hong- xia ,DU Xi- bo (1. School of Mechanics and Power Engineering, Henan Polytechnic University,Jiaozuo 454000,China; 2. Statedowned Assets Management Bureau, Henan Polytechnic University,Jiaozuo 454000 ,China) |
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| Abstract: | This paper presents an investigation about precision positioning mechanism, which used flexible hinge as flexible guide, piezoelectric bimorph as actuator, combined with the magnifying principle of triangular,and used linear variable differential transformer （LVDT） as displacement detection. The experiments show that the precise positioning mechanism’s motion range is 0～25μm, positioning accuracy is 15nm. |
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| Keywords: | piezoelectric bimorph precision positioning mechanism flexible hinge |
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