基于柱面坐标系的新型光学坐标测量机的研制

研制了一种基于柱面坐标系的新型专用非球面坐标测量机,通过测量非球面多条子午截线实现对非球面形的全口径检测。在结构设计方面,采用了龙门框架加回转运动的形式,利用高精度气浮导轨实现水平运动,利用端齿盘实现对工件的精确分度,通过点位测量的方式实现对非球面形的高精度检测。在软件方面,建立了系统的数学模型和柱面坐标系下回转对称非球面形全口径检测算法,并在VC++6.0和Matlab平台上编制了测控软件和数据处理软件。系统最大测量口径为600 mm,测量高度为25 mm,最小测量步长为1 mm,经过系统误差补偿后,系统精度优于1 μm,满足了精磨、粗抛阶段非球面形检测要求。试验表明:系统运行良好,精度满足要求,同时具有良好的通用性,可用于非球面精磨、粗抛阶段的检测。

Development of a new optical coordinate measuring machine in cylinder coordinates

A new special-purpose optical coordinate measuring machine(OCMM) was developed with the cylinder coordinates to realize full aperture testing of the optical aspherics in the stage of grinding and pre-polishing.The full-aperture of optical aspherics can be measured with testing several meridians point by point.In the aspect of hardware,the system was composed mainly by an ultra-precise air-rail for the linear motion,and a graduator for the rotary motion.In the aspect of software,for analyzing the mathematical model of a system,a new algorithm for the full-aperture testing of rotational-symmetric aspherics was astablised.The testing software and data-processing software were written on the VC++6.0 and Matlab platform respectively.The system is shown the better performance in the maximum measurement range of 600 mm,the maximum sag of 25 mm and the minimum sampling step of 1 mm.After the compensation of the systematic errorsthe accuracy is higher than 1 μm in full scale.The experimental results conclude that the optical coordinate measuring machine has a good universal and can satisfy requirement in the grinding and pre-polishing process for asphere testing.