| 溶胶凝胶法制备介孔五氧化二钽薄膜 |
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| 引用本文： | 任萍,王东新.溶胶凝胶法制备介孔五氧化二钽薄膜[J].宁夏工程技术,2012(4):348-350. |
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| 作者姓名： | 任萍 王东新 |
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| 作者单位： | 宁夏东方钽业股份有限公司;国家钽铌特种金属工程技术研究中心 |
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| 摘 要： | 以五氯化钽为反应前驱体，三嵌段两性聚合物P123做天然模板，用溶胶凝胶法制备出了介孔五氧化二钽薄膜．经过SEM检测分析，薄膜厚度约为200nm．XRD研究结果表明，制得的薄膜具有明显的介孔结构，经TEM检测可以观察到孔洞结构；得到的五氧化二钽薄膜经过400℃煅烧1h，介孔结构仍然得到保留．
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| 关 键 词： | 五氧化二钽 薄膜 介孔 溶胶凝胶法 |
Preparation of mesoporous tantalum pentoxide film by sol-gel method |
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| REN Ping,WANG Dongxin.Preparation of mesoporous tantalum pentoxide film by sol-gel method[J].Ningxia Engineering Technology,2012(4):348-350. |
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| Authors: | REN Ping WANG Dongxin |
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| Affiliation: | 1.Ningxia Orient Tantalum Industry Co.,Ltd.,Shizuishan 753000,China; 2.China Tantalum and Niobium Technology Research Center,Shizuishan 753000,China) |
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| Abstract: | Mesoporous tantalum oxide （Ta2O5） thin film is successfully prepared by surfactant template sol-gel process from tantalum chloride and template P123. SEM analysis shows the thickness of this film is about 200 nm. The obtained film has mesoporous structure that is characterized by means of low angle X-ray diffraction （Siemens D500/D501）, and the pore structure can be view by transmission electron microscopy （Jeol, JEM-2100）. Tantalum pentoxide film after calcination at 400 ℃ for 1 h mesoporous structure is still preserved. |
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| Keywords: | Ta2O5 thin film mesoporous sol-gel method |
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