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硅纳米梁振动基波频率的半连续体模型
引用本文:陆清茹,鲍芳,于虹,黄庆安.硅纳米梁振动基波频率的半连续体模型[J].传感技术学报,2008,21(3):469-472.
作者姓名:陆清茹  鲍芳  于虹  黄庆安
作者单位:东南大学MEMS重点实验室,南京;东南大学MEMS重点实验室,南京;东南大学MEMS重点实验室,南京;东南大学MEMS重点实验室,南京
基金项目:国家重点基础研究发展计划资助项目(2006CB300404)
摘    要:基于Sun-Zhang提出的应变能量计算模型,根据动势能转换与守恒原理,提出了用于分析硅纳米梁基波频率的半连续体模型。与传统的连续体模型相比,该方法考虑了厚度方向进入纳米尺度所带来的物理特性的离散化现象。本文对理论推得的基频模型进行了验证,在极小尺寸时,使用分子动力学软件MaterialStudioTM验证,在较大尺寸时,用连续介质模型验证,从验证结果可以看出,在这两种尺寸下,各自都很吻合,说明该模型可以适用于从纳米尺寸到宏观尺寸的所有尺度范围。

关 键 词:NEMS  硅纳米梁  半连续体  频率
文章编号:1004-1699(2008)03-0469-04
修稿时间:2007年9月30日

A Semicontinuum Model of Nature Frequency for Nanoscaled Clamped Silicon Beam
LU Qingru,BAO Fang,YU Hong,HUANG Qing-an.A Semicontinuum Model of Nature Frequency for Nanoscaled Clamped Silicon Beam[J].Journal of Transduction Technology,2008,21(3):469-472.
Authors:LU Qingru  BAO Fang  YU Hong  HUANG Qing-an
Affiliation:Key Laboratory of MEMS of the Ministry of Education, Southeast University
Abstract:Based on the strain energy model presented by Sun-Zhang and the energy conversion and energy conservation,a new semicontinuum model is presented to calculate the nature frequency of a nanoscaled clamped-clamped silicon beam.In comparing with the traditional continuum medium theory,it accounts for the discrete nature in the thickness direction of the beam.We calculate the nature frequency of a nanoscaled silicon beam,a software named Material StudioTM is used to verify the model in nano-size,while in macro-size,continuum medium model is used.Investigating the obtained nature frequency,it is found that the results coincide well both in nano-size and in macro-size,so the model is valid both in nano-size and in macro-size.
Keywords:NEMS  nanoscaled silicon beam  semicontinuum  frequency
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