考虑边缘效应的微镜静电力学性能分析

该文基于计及边缘效应的矩形平行板静电力计算公式,建立了扭转微镜的非线性静力学模型,分析了边缘效应对微镜静态特性和吸合特性的影响,并通过与实验数据的比较,证明该文所建立的模型更接近于实际。数值分析表明,微镜的激励电压、微镜电极的几何尺寸等参数都会影响微镜的边缘效应,从而使微镜的静态响应产生较大的误差。因此,在某些情况下分析微镜力学性能时必须考虑边缘效应的影响。

ANALYSIS OF ELECTROSTATIC MECHANICAL CHARACTERISTICS OF MICRO-MIRROR WITH EDGE EFFECTS

Based on the electrostatic force computation formulas of the rectangle capacitor with edge effects,a nonlinear static characteristic model of a torsion micro mirror is developed,and the effecting of edge effects on the static characteristics and on the pull in characteristics is also analyzed.By compared with experimental results, it is proved that the results by the presented model are closer to their practical counterparts.Numerical calculated results show that parameters,such as voltage,geometry dimensions of the micro mirror electrodes etc,can affect the edge effect,which leads a larger error in static response.Therefore,in some cases the edge effects must be considered when analyze the mechanical characteristics of micro mirrors.