Porous alumina nano-membranes: Soft replica molding for large area UV-nanoimprint lithography |
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| Authors: | Weimin Zhou Xiaoming Niu Guoquan Min Zhitang Song Jing Zhang Yanbo Liu Xiaoli Li Jianping Zhang Songling Feng |
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| Affiliation: | aNanotechnology Promotion Center (SNPC), Shanghai 200237, China;bLaboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China |
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| Abstract: | High-density ordered arrays of h-PDMS nanopillars were fabricated using an anodic aluminium oxide (AAO) template. The pore diameter and the interpore distance of the replica h-PDMS molding are well consistent with that of AAO template. The inverse h-PDMS has the surface characteristic of hydrophobic and surface energy of 130°. Hexagonally arranged array can be obtained by UV-nanoimprint lithography using our proposed h-PDMS mold, and their morphologies can be transferred truly. Besides, the h-PDMS mold has been used to fabricate photonic crystal structure on GaN by nanoimprint process, which could be found an application in the light output of GaN LED. |
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| Keywords: | AAO membrane UV-nanoimprint lithography GaN photonic crystal |
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