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4500V SPT IGBT 动静态损耗优化
引用本文:戴庆芸,田晓丽,张文亮,卢烁今,朱阳军. 4500V SPT IGBT 动静态损耗优化[J]. 半导体学报, 2015, 36(9): 094007-4. DOI: 10.1088/1674-4926/36/9/094007
作者姓名:戴庆芸  田晓丽  张文亮  卢烁今  朱阳军
摘    要:本文关注高压IGBT动静态性能的优化。对4500V增强型平面IGBT进行研究,该结构在阴极一侧具有载流子存储层。其中垂直结构采用软穿通(SPT)结构,顶部结构采用增强型平面结构,该结构被称为SPT IGBT,仿真结果显示4500V SPT 具有软关断波形,与SPT结构相比提升了导通压降和关断损耗之间的折衷关系。同时,对不同载流子存储层掺杂浓度对动静态性能的影响也进行了研究,以此来优化SPT IGBT的动静态损耗。

关 键 词:IGBT  SPT%2B  carrier stored layer  on-state voltage drop  turn-off loss  trade off characteristic
收稿时间:2015-02-05

4500 V SPT+ IGBT optimization on static and dynamic losses
Dai Qingyun,Tian Xiaoli,Zhang Wenliang,Lu Shuojin and Zhu Yangjun. 4500 V SPT+ IGBT optimization on static and dynamic losses[J]. Chinese Journal of Semiconductors, 2015, 36(9): 094007-4. DOI: 10.1088/1674-4926/36/9/094007
Authors:Dai Qingyun  Tian Xiaoli  Zhang Wenliang  Lu Shuojin  Zhu Yangjun
Affiliation:1. Jiangsu R&D Center for Internet of Things, Wuxi 214135, China;2. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;3. Junshine CA S-IGBT Technology Co., Ltd, Wuxi 214135, China
Abstract:This paper concerns the need for improving the static and dynamic performance of the high voltage insulated gate bipolar transistor (HV IGBTs). A novel structure with a carrier stored layer on the cathode side, known as an enhanced planar IGBT of the 4500 V voltage class is investigated. With the adoption of a soft punch through (SPT) concept as the vertical structure and an enhanced planar concept as the top structure, signed as SPT+ IGBT, the simulation results indicate the turn-off switching waveform of the 4500 V SPT+ IGBT is soft and also realizes an improved trade-off relationship between on-state voltage drop (Von) and turn-off loss (Eoff) in comparison with the SPT IGBT. Attention is also paid to the influences caused by different carrier stored layer doping dose on static and dynamic performances, to optimize on-state and switching losses of SPT+ IGBT.
Keywords:IGBT  SPT+  carrier stored layer  on-state voltage drop  turn-off loss  trade off characteristic
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