一种表面结构多尺度融合测量系统

提出了一种表面结构多尺度融合测量系统，该系统将显微图像测量、垂直扫描白光干涉测量、白光干涉纳米探针测量和白光干涉金刚石探针测量等多种不同尺度的表面结构测量方法融合在一起。实验结果表明，显微图像测量对300μm标准玻璃线纹尺的示值误差为-0.251μm，标准偏差为0.4013μm；白光干涉测量对1.26μm和3.33μm单刻线样板的测量平均值分别为1.263μm 和3.328μm，示值误差分别为0.003μm和 -0.002μm，示值相对变化量为1.27%和0.63%；白光干涉纳米探针对高度为（106.8±1.0）nm的校准光栅测量平均值为103.1nm，相对示值误差为-3.5%；白光干涉金刚石探针测量对Ra=4.08μm样板的测量值为4.05μm，测得值的相对误差为0.74％。所提出的测量系统满足表面结构的多尺度融合测量要求。

A Kind of Multi-scale Integration Measurement System for Surface Textures

A multi-scale integration measurement system was presented. Different scale measurement methods were integrated, such as microscopic image measurement, vertical scanning white light interferometry measurement, nano-probe measurement by white light interferometry and diamond probe measurement by white light interferometry. The measurement results show that in microscopy image measurement for standard glass thread ruler of 300μm, the indication error is as -0.251μm and the standard deviation is as 0.403μm. In white light interferometry for single engraved templates of 1.26μm and 3.33μm, the mean measurements are as 1.263μm and 3.328μm, indication errors are as 0.003μm and -0.002μm，the relative change of indication are as 1.27% and 0.63% respectively. In nano-probe measurement by white light interferometry for calibration grating of (106.8±1.0)nm, the mean is as 103.1nm and the relative error is as -3.5%; in diamond probe measurement by white light interferometry for standard template of Ra=4.08μm, the measurement Ra is as 4.05μm and the relative error is as 0.74％. The introduced system may satisfy the measurement needs and realize the multi-scale integration measurement for surface textures.