| 高温压力传感器的力敏电阻条的制备 |
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| 引用本文： | 何建建,孙以材,潘国峰. 高温压力传感器的力敏电阻条的制备[J]. 传感器世界, 2009, 15(4): 18-21 |
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| 作者姓名： | 何建建 孙以材 潘国峰 |
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| 作者单位： | 河北工业大学微电子所,300130 |
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| 摘 要： | 本文探讨了一种金属薄膜高温压力传感器的力敏电阻条的制作方法，采用氮化铝作铜村底和金属力敏电阻条之间的电绝缘层，利用铜金属在高温条件下也能够表现出压阻特性，制作力敏电阻条。通过直流磁控溅射制作力敏电阻条，并引线，封装，进行测试，最后反应出随压力的变化电阻的变化关系。
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| 关 键 词： | 压力传感器 引线 直流磁控溅射 力敏电阻 |
Fabrication of force-sensitive resistor strip for high temperature pressure sensor |
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| HE Jian-jian,SUN Yi-cai,PAN Guo-feng. Fabrication of force-sensitive resistor strip for high temperature pressure sensor[J]. Sensor World, 2009, 15(4): 18-21 |
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| Authors: | HE Jian-jian SUN Yi-cai PAN Guo-feng |
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| Affiliation: | Hebei University of Technology;Tianjin 300130;China |
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| Abstract: | The fabrication method of the force-sensitive resistor strip for the metal thin film pressure sensor used in high temperature is discussed in this paper.AIN is used as insulation layer between copper substrate and force-sensitive metal resistor strip.Then the copper metal's force-sensitive speciality that copper metal can still display the piezoresistance characteristic even under the high temperature condition is taken advantage of.The force-sensitive resistor strip is made by DC magnetron sputtering metho... |
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| Keywords: | pressure sensor high temperature welding DC magnetron reactive sputtering mounting technique |
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