AFM光杠杆系统在刻划深度控制中的应用分析

应用AFM组建三维刻划加工系统，光杠杆系统是实现刻划深度控制的重要环节．通过分析微悬臂挠度、转角对光杠杆系统的影响，及不同刻划方向针尖扭转角对刻划深度的影响，得出以下结论：由非刚性微悬臂组成的光杠杆系统，与理想光杠杆系统存在3：2的线性检测变换关系，可采用单点标定方法对光杠杆系统进行标定；沿相对于微悬臂长轴进行横向刻划时针尖扭转角所产生的刻划深度误差，远小于沿纵向刻划所产生的刻划深度误差．

Application Analysis of AFM Optical Lever System in Control of Scratching Depth

The calibrating of AFM optical lever detection system is an important issue in control of scratching depth employing AFM-based nanometer 3D scratching machining system.Effects of the micro-cantilever deflec- tion and torsion angle on the optical lever system and effects of torsion angles at the point of the microprobe when scratching along different scratching directions on scratching depth in scratching tests are discussed and following conclusions can be drawn:A linear relationship(3:2)between the non-rigidity micro-cantilever opti- cal lever and the ideal optical lever is found indicating that the optical lever detection system can be calibrated by single point calibration approach.The error of scratching depth scratching along the parallel direction relative to the long axis of the cantilever is much less than that scratching along the perpendicular direction.