载体加速度对静电驱动微机械陀螺响应的影响分析

载体的运动会导致微机械陀螺的响应发生变化,因而引起测量误差,甚至导致系统故障.针对载体运动对微机械陀螺响应的影响开展研究.考虑载体运动以及微陀螺的非线性支承刚度和非线性静电力,基于拉格朗日方程建立了系统的动力学方程.利用谐波平衡法结合留数定理求解了含分式非线性项的系统的周期响应,研究了载体加速度对系统响应特性的影响,发...

Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope

Carrier motion may cause variation of a MEMS gyroscope’s response,and measurement error and even system failure.Here,effects of carrier motion on response of a MEMS gyroscope were studied.Considering carrier motion,nonlinear support stiffness and nonlinear electrostatic force of a MEMS gyroscope,the dynamic equation of the system was established based on Lagrange equation.The periodic response of the system with fractional nonlinear term was solved using the harmonic balance method combined with the residue theorem.Effects of carrier acceleration on response characteristics of the system were studied.It was shown that the carrier acceleration in driving direction can reduce the sensitivity of the system;the carrier acceleration in detecting direction can not only reduce the system sensitivity but also cause zero bias,zero bias is proportional to the magnitude of the acceleration in detecting direction,and this proportional relation is independent of drive voltage;when driving voltage is smaller,lower carrier acceleration in detecting direction has little effect on the system sensitivity and nonlinearity;when driving voltage or carrier acceleration in detecting direction is larger,the system sensitivity drops sharply,and its nonlinearity changes dramatically.