面向平板结构钙钛矿太阳能电池的金属氧化物综述

作为平板结构钙钛矿太阳能电池的电荷传输层，金属氧化物薄膜对器件性能有重要影响. 系统性概述平板结构钙钛矿太阳能电池对金属氧化物薄膜形貌、电学、光学、化学及热等物理特性要求，并对目前在高效钙钛矿太阳电池制备中最有前景的金属氧化物电子传输层及空穴传输层材料特性及代表性工作进行总结. 针对大多数金属氧化物迁移率低、表面缺陷多及能级匹配差的问题，分析元素掺杂、表面改性、复合薄膜设计等手段解决的相关进展. 总结目前金属氧化物薄膜沉积技术现状及优缺点，探讨今后薄膜沉积技术发展、改进方向. 对低温沉积金属氧化物薄膜在柔性器件方面的应用进行展望.

Review on metal-oxide materials applied in planar perovskite solar cells

As the carrier transport layer in planar perovskite solar cells, metal oxide films have important influence on device properties. The requirements of metal oxide films for planar solar cells in the respect of the morphology, electrical, optical, chemical and thermal properties were systematically overviewed. Worthwhile, the materials characteristic and representative work involving the most promising metal oxide film work as electron transport layer or hole transport layer material were summarized. Research progress of adopting methods such as element doping of metal oxides, surface modification of film and design of composite metal oxide film to improving film mobility, minimizing surface defects and adjusting energy level were proposed. Moreover, the future requirement and the improvement direction of metal oxide thin film deposition technology were discussed after summarizing the advantages and disadvantages of the deposition technology. Finally, the application of low-temperature deposited metal oxide films in flexible devices was expected.