3-RRR并联微动机器人结构误差对其运动精度的影响

基于并联机构原理的微动机器人具有结构刚度大,承载能力强,运动精度高,具有误差平均效应等一系列优点,因此在生物技术、半导体集成和精密微驱动等领域中都有广泛应用。运动控制精度是并联微动机器人最重要的技术指标之一,提高精度不仅要提高驱动精度和构件加工精度,还要对结构参数进行识别以得到精确的结构参数。文章主要通过对3-RRR并联机器人进行位姿反解,并对结构参数方程进行微分来研究结构误差对其精度的影响。

Structure error Influence on the precision of 3-RRR micro-motion stage

Recent years have found that parallel micro-manipulators were applied in many areas such as,biotechnology,semiconductors and micro-motion stage.The reason is parallel micro-manipulator are innately provided with high structural rigidity,strong carrying capacity,high-precision movement,and an average error of a series of advantages,are in wider application,such as Accuracy is parallel micro-stage the most important indicator of technology to enhance not only to improve the accuracy and precision drive components processing precision,but also to identify the structural parameters to be precise parameters of the structure.In this paper,mainly through the 3-RRR parallel stage to pose anti-solution,and structural parameters of differential equations to study the structure of error of the impact of their accuracy.