Ultrahigh-frequency surface acoustic wave transducers on ZnO/SiO?/Si using nanoimprint lithography
引用本文:
S Büyükk?se,B Vratzov,D Ata?,J van der Veen,PV Santos,WG van der Wiel.Ultrahigh-frequency surface acoustic wave transducers on ZnO/SiO?/Si using nanoimprint lithography[J].Nanotechnology,2012,23(31):315303.