MEMS微型热管研究进展

MEMS微型热管作为一种新型的热管技术,在微电子、光电池、红外探测头和激光二极管等的热控制方面具有很大的应用前景。首先,介绍了MEMS微型热管的特点和基本工作原理,简单回顾了其发展历程。然后,从MEMS微型热管的加工制作方法、通道尺寸和总体结构特点出发,指出了其优势所在。在此基础上,综述了近年来微型槽道热管、微型毛细泵回路、微型回路热管和微型振荡热管等不同类型MEMS微型热管的研究进展。最后,总结了MEMS微型热管的发展趋势和实际应用所面临的挑战,指出降低制作成本、优化工质充注封装工艺、改进测试手段和加强运行机理研究是今后工作的重点。

Research Progress of MEMS Micro Heat Pipes

The MEMS micro heat pipe,as a novel heat pipe technology,is considered as one of the most promising choices for thermal control applications in microelectronics,photovoltaic cells,infrared detectors,laser diodes,etc.The basic principle and characteristics of MEMS micro heat pipes are firstly introduced,and the development history of which is reviewed briefly.Then,the fabrication method,channel size,and overall structure feature are compared with those of a traditional heat pipe,which account for the advantages of a MEMS micro heat pipe.Based on the discussion above,the progress of the micro grooved heat pipe,micro capillary pumped loop,micro loop heat pipe,micro pulsating heat pipe and other different types of the MEMS micro heat pipes are thoroughly reviewed.Finally,the development tendency and challenges impacting on real applications of MEMS micro heat pipes are prospected,and it is pointed out that the fabrication cost reduction,working fluid filling and packaging optimization,testing method improvement,as well as operational mechanism investigation are identified as major issues for the future research.