Ellipsometric detection of gases with the surface plasmon resonance effect on gold top-coated with sensitive layers |
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| Authors: | A. Nooke,U. BeckA. Hertwig,A. KrauseH. Krü ger,V. LohseD. Negendank,J. Steinbach |
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| Affiliation: | a BAM Federal Institute for Materials Research and Testing, Division II.1 Gases, Gasplants, Unter den Eichen 87, 12205 Berlin, Germanyb BAM Federal Institute for Materials Research and Testing, Division VI.4 Surface Technologies, Unter den Eichen 44-46, 12203 Berlin, Germanyc Technische Universität Berlin, Faculty III Process Sciences, Plant Safety of Industrial systems and Chemical Process Safety, Straße des 17. Juni 135, 10623 Berlin, Germany |
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| Abstract: | An ellipsometric gas sensor based on the surface Plasmon resonance (SPR) effect of ~ 43 nm thick gold layers was investigated. To protect the gold layer from contamination and to improve the detection limits, the gold layers were top-coated with 5-6 nm thick layers of organic a-C:H or with inorganic metal oxides TiO2 or ZrO2. The additional layers increased the long-term stability, whereas the metal oxide layers protect better than a-C:H. Furthermore, the additional layers decreased the detection limits by one order of magnitude in case of a-C:H and two orders of magnitude in case of the oxides. It could be shown that the detection limits also depend on the kind of preparation (sol-gel process or physical vapour deposition) of the additional layers. |
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| Keywords: | Gas sensor SPR Ellipsometry Sensitive layer TiO2 ZrO2 a-C:H |
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