ZnO纳米晶须的形态控制及其结构表征

采用激光分子束外延法先在Si(111)衬底上制备Zn薄膜,在不同的氧气体积流量和生长温度下,用热蒸发法在镀有Zn薄膜的Si(111)衬底上制备了不同形貌的ZnO纳米晶须。分别用X射线衍射(XRD)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)和高分辨透射电子显微镜(HRTEM)对样品的成分、微结构和形貌进行了表征。Zn薄膜在高温下被氧化,并为晶体生长提供均匀的成核点,有利于形成一定大小和数量的ZnO晶核。研究结果表明,氧气体积流量和生长温度对ZnO纳米晶须的形貌有一定的影响。

Morphology Control and Structure Characteristics of ZnO Nano Crystal Whiskers

The Zn film was deposited on the Si(111) substrate with the laser molecular beam epitaxy.The ZnO nano crystal whiskers with different shapes were synthesized on the Si(111) substrate plated with the Zn film under different flow rates of O2 and growth temperatures by thermal evaporation method.The composition,microstructure and morphology of the as-synthesized ZnO nano crystal whiskers were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM),transmission electron microscopy(TEM) and high-resolution transmission electron microscopy(HRTEM).The Zn film was oxidized under high temperature and provided the uniform nucleation sites for the crystal growth,which would benefit the formation of the ZnO crystal nuclei in certain size and quantity.The research result shows that the volume flow rate of O2 and growth temperature can influence the morphology of the ZnO nano crystal whiskers.