| 基于石英和载玻片的微电极制备工艺研究 |
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| 引用本文： | 张晓飞 张 洋 谭秋林等. 基于石英和载玻片的微电极制备工艺研究[J]. 传感器与微系统, 2014, 0(7): 32-34,41 |
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| 作者姓名： | 张晓飞 张 洋 谭秋林等 |
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| 作者单位： | 中北大学电子测试技术重点实验室;中北大学仪器科学与动态测试教育部重点实验室;香港城市大学机械及生物医学工程系; |
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| 基金项目： | 山西省百人计划支持项目 |
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| 摘 要： | 研究以石英片和载玻片为基底的微电极制备工艺,以较常见的叉指型电极为例,基于光刻工艺中各工艺参数要求,重点研究曝光和显影时间对微电极的影响。制得的2种不同基底的电极,采用对比度、精度等关键参数进行分析,最终确定选用载玻片作为芯片基底并获得其最佳工艺参数;制作带电极的PDMS—玻璃微流控芯片,通过实验,成功观察到酵母菌细胞的正、负介电泳现象。
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| 关 键 词： | 微流控芯片 光刻工艺 微电极 介电泳 |
Research on preparation of microelectrodes based on quartz and glass slides |
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| Affiliation: | ZHANG Xiao-fei;ZHANG Yang;TAN Qiu-lin;SUN Dong;XIONG Ji-jun;XUE Chen-yang(Science and Technology on Electronic Test ＆ Measurement Laboratory,North University of China;Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China;Department of Mechanical and Biomedical Engineering,City University of Hong Kong) |
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| Abstract: | Take the interdigited electrodes as an example,the preparation of microelectrodes based on quartz and glass slides are investigated,based on requirement for parameters of photolithography,study is focused on influence of exposure and development time on microelectrodes.Two different electrodes are fabricated on two kinds of substrates separately,and analysis is carried out using contrast,precision and other key parameters,and slide is selected as the chip substrate,and also the optimal process parameters are obtained ultimately,fabricate PDMSglass microfluidic chip with integrated electrodes,positive and negative DEP phenomenon of yeast cells is observed through experiments successfully. |
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| Keywords: | microfluidic chip photolithography microelectrode dielectrophoresis |
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