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Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature |
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| Authors: | HAN DeDong WANG Yi ZHANG ShengDong SUN Lei HAN RuQi Satoru MATSUMOTO Yuji INO |
| Affiliation: | [1]Institute of Microelectronics, Peking University, Beijing 100871, China [2]Department of Electrical Engineering, Keio University, Tokyo, Japan |
| Abstract: | |
| Keywords: | ZnO thin film transparent oxide semiconductor sputtering power room temperature process |
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