The effect of thermal annealing on Fe/TiO2 coatings deposited with the help of RF PECVD method. Part I. Chemical and phase composition |
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| Affiliation: | 1. Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924 Lodz, Poland;2. Department of Molecular Engineering, Faculty of Process and Environmental Engineering, Lodz University of Technology, Wolczanska 213, 90-924 Lodz, Poland;1. Department of Basic Sciences, Science Faculty, Erzurum Technical University, Erzurum 25240, Turkey;2. Department of Physics, Faculty of Science, Atatürk University, Erzurum 25240, Turkey;3. Department of Nanoscience and Nanotechnology, Faculty of Engineering, Recep Tayyip Erdo?an University, Rize 53100, Turkey;1. State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, Lanzhou University of Technology, Lanzhou 730050, China;2. Key Laboratory of Nonferrous Metal alloys and Processing, Ministry of Education, Lanzhou University of Technology, Lanzhou 730050, China;3. School of Mechanical Engineering, Shenyang University of Chemical Technology, Shenyang 110142, China;1. Chemicobiology and Functional Materials Institute, Nanjing University of Science and Technology, Nanjing 210094, PR China;2. National Special Superfine Powder Engineering Research Center, Nanjing University of Science and Technology, Nanjing 210094, PR China;1. Department of Physics, NED University of Engineering & Technology, Karachi-75270, Pakistan;2. Centre of Excellence in Solid State Physics, University of the Punjab, Lahore, 54590, Pakistan;1. Kongu Engineering College, Perundurai, Erode 638052, Tamilnadu, India;2. i-Micro, Masdar Institute of Science and Technology, Masdar City 54224, Abu Dhabi, United Arab Emirates;3. Department of Physics and Nanotechnology, SRM University, Kattankulathur 603 203, Tamilnadu, India;4. Department of Physics, Ethiraj College for Women, Chennai, Tamilnadu, India;1. No. 3 Department, Air Force Early Warning Academy, Wuhan 430019, People''s Republic of China;2. School of Mathematics and Physics, China University of Geosciences (Wuhan), Wuhan 430074, People''s Republic of China |
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| Abstract: | Results of the studies on chemical structure and phase composition of both non-annealed and thermally annealed iron doped TiO2 coatings are presented. The coatings were synthesized with the help of radio frequency plasma enhanced chemical vapor deposition (RF PECVD) and characterized by iron content in the range of 0–4.76 at%. In these studies, an analysis of both elemental composition and chemical bonding was performed with the help of X-ray photoelectron spectroscopy (XPS). X-ray diffraction (XRD) was applied to determine phase composition and Fourier transform infrared spectroscopy (FTIR) was used as a supplementary source of information. The obtained elemental composition data show that, apart from titanium, oxygen and iron, traces of chlorine as well as substantial amounts of carbon are present in the coatings. While chlorine has originated from plasma decomposition of TiCl4, used as a source of titanium, a presence of carbon is associated with a surface contamination resulting from photocatalytic reactions of TiO2 with the adsorbed carbon dioxide. The results of XPS and FTIR indicate that thermal annealing not only modifies phase composition of these materials, but also affects chemical bonding. Finally, XRD analysis shows that iron content has an effect on the size of coherent diffraction domains present in the films. |
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| Keywords: | RF PECVD method Thermal annealing Structure Rutile |
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