Fiber deflection probe for small hole metrology

This paper presents the development of a new probing method for coordinate measuring machines (CMM) to inspect the diameter and form of small holes. The technique, referred to as fiber deflection probing (FDP), can be used for holes of approximately 100 μm nominal diameter. The expanded uncertainty obtained using this method is 0.07 μm (k = 2) on diameter. The probing system consists of a transversely illuminated fiber (with a ball mounted on the end) whose shadows are imaged using a camera. We can infer the deflection of the probe from the motion of the image seen by the camera, and we infer the position of the measured surface by adding the fiber deflection along x- and y-directions to the machine scale readings. The advantage of this technique is the large aspect ratio attainable (5 mm deep for a 100 μm diameter hole). Also, by utilizing the fiber as a cylindrical lens, we obtain sharp crisp images of the fiber position, thus enabling high resolution for measured probe deflection. Another potential advantage of the probe is that it exerts an exceptionally low force (ranging from a few micronewtons down to hundreds of nanonewtons). Furthermore, the probe is relatively robust, capable of surviving more than 1 mm over-travel, and the probe should be inexpensive to replace if it is broken. In this paper, we describe the measurement principle and provide an analysis of the imaging process. Subsequently, we discuss data obtained from characterization and validation experiments. Finally, we demonstrate the utility of this technique for small hole metrology by measuring the internal geometry of a 129 μm diameter fiber ferrule and conclude with an uncertainty budget.