| 工艺公差对聚合物竖直耦合型微环谐振器性能的影响 |
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| 引用本文： | 汪玉海,秦政坤,王春旭,王立忠. 工艺公差对聚合物竖直耦合型微环谐振器性能的影响[J]. 半导体学报, 2012, 33(10): 104007-4 |
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| 作者姓名： | 汪玉海 秦政坤 王春旭 王立忠 |
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| 作者单位： | College of Information and Technology, Jilin Normal University, Siping 136000, China;College of Information and Technology, Jilin Normal University, Siping 136000, China;College of Information and Technology, Jilin Normal University, Siping 136000, China;College of Information and Technology, Jilin Normal University, Siping 136000, China |
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| 基金项目： | 吉林省科技发展计划基金 |
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| 摘 要： | 本文根据波导耦合模理论，分析了工艺公差对聚合物竖直耦合型微环谐振器性能的影响。分析结果表明，工艺公差将引起谐振器传输光谱的漂移和光谱形状的改变。为了实现谐振器正常的滤波功能，我们对微环谐振器工艺公差的累积和补偿效应进行了讨论。
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| 关 键 词： | 制造误差 传输特性 谐振器 聚合物 微环 耦合 垂直 计算结果 |
| 收稿时间： | 2012-03-18 |
Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator |
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| Wang Yuhai,Qin Zhengkun,Wang Chunxu and Wang Lizhong. Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator[J]. Chinese Journal of Semiconductors, 2012, 33(10): 104007-4 |
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| Authors: | Wang Yuhai Qin Zhengkun Wang Chunxu Wang Lizhong |
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| Affiliation: | College of Information and Technology, Jilin Normal University, Siping 136000, China;College of Information and Technology, Jilin Normal University, Siping 136000, China;College of Information and Technology, Jilin Normal University, Siping 136000, China;College of Information and Technology, Jilin Normal University, Siping 136000, China |
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| Abstract: | The effects of manufacturing errors on transmission characteristics are analyzed for a polymer vertical coupling microring resonator. Calculated results show that the errors cause a shift and shape change of the transmission spectrum compared to the designed case without errors. Furthermore, accumulation and compensation for the errors is researched. In order to realize the normal filtering for the fabricated microring resonator device, some allowed errors are discussed. |
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| Keywords: | microring resonator manufacturing error polymer transmission spectrum |
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