| 薄膜磁敏元件基片的选择与制备 |
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| 引用本文： | 李云鹏 关杰 等. 薄膜磁敏元件基片的选择与制备[J]. 仪表技术与传感器, 1995, 0(3): 14-16,30 |
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| 作者姓名： | 李云鹏 关杰 等 |
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| 作者单位： | [1]沈阳工业大学，沈阳市110023 [2]沈阳仪器仪表工艺研究所 |
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| 摘 要： | 本文论述了薄膜磁敏元件对基片的要求，依此要求选择硅和高密度铁氧体为基片，上部制备SiO2作绝缘膜。重点讨论了用射频溅射法制备SiO2膜。文章就溅射条件和膜特性进行了实验，给出实验结果。
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| 关 键 词： | 薄膜 磁敏元件 基片 溅射 |
Selection and Fabrication of Substrate for Thin Film Magneto sensors |
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| Li Yunptng,Sun Chengsong and Zhou LijunShenyang Polytechnic University,Shengyang Guan Jie and Zeng YongningShenyang Institute of Instrumentation Technology of the Misistry of Machinery Industry,Shenyang. Selection and Fabrication of Substrate for Thin Film Magneto sensors[J]. Instrument Technique and Sensor, 1995, 0(3): 14-16,30 |
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| Authors: | Li Yunptng Sun Chengsong Zhou LijunShenyang Polytechnic University Shengyang Guan Jie Zeng YongningShenyang Institute of Instrumentation Technology of the Misistry of Machinery Industry Shenyang |
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| Affiliation: | Li Yunptng,Sun Chengsong and Zhou LijunShenyang Polytechnic University,Shengyang 110023Guan Jie and Zeng YongningShenyang Institute of Instrumentation Technology of the Misistry of Machinery Industry,Shenyang 110043 |
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| Abstract: | Requirement of Substrate in thin film magneto sensor is reported. In accordance with the requirement, We select silicon and ferrite of high density as substrate. SiO2 is made insulation film on the substrate. It is the key that SiO2 film is made by sputtering. This paper researched influence of sputtering condition and gives result of experiment. |
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| Keywords: | Thin Film Magneto Sensor Substrate Sputtering. |
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