| 离子束溅射生成气敏膜的研究 |
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| 引用本文： | 陈俊 胡兴定. 离子束溅射生成气敏膜的研究[J]. 仪表技术与传感器, 1995, 0(6): 16-19,32 |
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| 作者姓名： | 陈俊 胡兴定 |
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| 作者单位： | 北京有色金属研究总院，北京师范大学，北京师范大学，北京师范大学 北京市100875，北京市100875，北京市100875 |
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| 基金项目： | 北京市青年自然科学基金支持 |
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| 摘 要： | 本文对离子束溅射生成气敏膜作了研究。与烧结陶瓷气敏传感器比较，溅射生成气敏膜对乙醇气体具有灵敏度高，长期稳定，对其它气体选择性好，而且响应恢复时间快。采用Ｘ光衍射等手段分析了离子束溅射膜的品质，表明材料组织结构相同，与基片附着性好，组织致密。
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| 关 键 词： | 气体传感器 薄膜 离子束溅射 气敏膜 |
A Study of Gas Sensitive Films Fabricated Through Ion Beam Sputtering |
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| Chen Jun,Zhang Tonghe,Hu Xingding and Zhang WenpuBeijing Normal University,Beijing .. A Study of Gas Sensitive Films Fabricated Through Ion Beam Sputtering[J]. Instrument Technique and Sensor, 1995, 0(6): 16-19,32 |
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| Authors: | Chen Jun Zhang Tonghe Hu Xingding Zhang WenpuBeijing Normal University Beijing . |
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| Affiliation: | Chen Jun,Zhang Tonghe,Hu Xingding and Zhang WenpuBeijing Normal University,Beijing 100875. |
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| Abstract: | This paper presents gas sensitive films fabricated through ion beam sputtering processes. Compared with sintered ceramic gas sensors, the gas sensitive films thus realized possess not only higher sensitivity to ethanol, better long-term stability, and higher selectivity to other gases, but also faster response and restoration time. Results of XRD, SEM and XPS analysis show that the films are homogeneous and dense in texture, good in substrate adhesion. |
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| Keywords: | Gas Sensor Thin Film Sputtering. |
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